Low-Temperature Bonding for Silicon-Based Micro-Optical Systems
نویسندگان
چکیده
منابع مشابه
Low-Temperature Bonding for Silicon-Based Micro-Optical Systems
Silicon-based integrated systems are actively pursued for sensing and imaging applications. A major challenge to realize highly sensitive systems is the integration of electronic, optical, mechanical and fluidic, all on a common platform. Further, the interface quality between the tiny optoelectronic structures and the substrate for alignment and coupling of the signals significantly impacts th...
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ژورنال
عنوان ژورنال: Photonics
سال: 2015
ISSN: 2304-6732
DOI: 10.3390/photonics2041164